AIChE Symposium Series, Volume 93, Issue 316American Institute of Chemical Engineers, 1997 - Chemical engineering |
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Page 138
... measurement is slow and the metrology tool may be physically located some distance from the processing tool as well . The slowness of the measurement causes fabs to start a lot before receiving the measurements from the last lot . This ...
... measurement is slow and the metrology tool may be physically located some distance from the processing tool as well . The slowness of the measurement causes fabs to start a lot before receiving the measurements from the last lot . This ...
Page 143
... measurement for control rather than direct film property measurement such as dopant distribution and whether the backside temperature measurement is sufficient for predicting film properties , due to topographic effects . Temperature ...
... measurement for control rather than direct film property measurement such as dopant distribution and whether the backside temperature measurement is sufficient for predicting film properties , due to topographic effects . Temperature ...
Page 288
... measurement is widely used in order to infer product composition . This paper addresses the design of a static PLS estimator using multiple temperatures for estimating the product compositions of the distillation columns . Design ...
... measurement is widely used in order to infer product composition . This paper addresses the design of a static PLS estimator using multiple temperatures for estimating the product compositions of the distillation columns . Design ...
Contents
Industry Assessment | 1 |
Predictive Control | 5 |
Adaptive and Nonlinear Control Fact or Fantasy? | 9 |
Copyright | |
22 other sections not shown
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adaptive control AIChE algorithm analysis analytical applications approach auto-correlation batch behavior changes Chem Chemical Engineering chemical process chip closed-loop constraints continuous control problems control system controller design defined developed discrete disturbance dynamic equations estimation example feedback control Figure finite Grafcet horizon hybrid systems identification IEEE implementation input linear control loop manufacturing matrix measured methods model predictive control monitoring Morari multivariable neural networks nonlinear control nonlinear model nonlinear systems on-line operating optimal control output error paper machine parameters Petri net PID controllers plant Proc process control process model programming Pulp and Paper quadratic quadratic program reactor robust robust control scheduling sensors sequence set point significant simulation snack food solution specifications stability step structure synthesis TAPPI Press techniques temperature theory tion trajectory transfer function trend trol uncertainty valve variables variance vector wafer